ALD System Upgrade (IPMS-CNT06.2) - PR867128-2480-P
About This Opportunity
This is a supplies contract in the trade and industry sector. Located in Germany, Europe, this opportunity is open to firms and consortiums.
Published through TED - Tenders Electronic Daily (EU), a national government procurement portal. Public procurement tenders follow the country's national bidding regulations and may have specific eligibility and documentation requirements for the supply of goods in the trade and industry sector. Supply contracts typically require bidders to demonstrate product compliance with technical specifications, delivery capacity, and relevant certifications. This contract has already been awarded. The information is published for transparency and market intelligence purposes.
Description
1 ALD System Upgrade: Pulsar-Upgrade (1 Kammer an bestehendes Mainframe)/ Pulsar Upgrade (1 chamber on existing XP4-Mainframe) The following specification describes the requirements of a piece of an equipment upgrade to deposit dielectric layers (doped) HfO2 via thermal ALD processing on wafers with a diameter of 300 mm. It is required that the device continuously performs the intended functions in accordance with all the requirements specified in this EPS without malfunction or failure. In addition, the device must be supplied with all the components and parts described below that are necessary for the device to fulfill the intended functionalities and capabilities in accordance with all the requirements specified in this EPS. The second Pulsar chamber from ASM as upgrade must be compatible to the existing mainframe "XP4" and the already existing chambers "Pulsar" and "EmerALD". Optionale Leistungspositionen / Options of the product /service specification: 2.2.1.1.1 Basic configuration one additional Loadport in Front End Interface (300mm, SEMI E184) yes / no 2.2.1.1.5 Basic configuration Waferrotation/Waferindexer in process chamber for better uniformity values available yes / no 2.2.1.1.7 Basic configuration insitu ellipsometer installation ports on the chamber yes / no 2.2.1.1.9 Basic configuration The Front End Interface is equipped with a notch aligner. This has a programmable notch angle with an accuracy of ≤0.5º for the notch and ≤0.1mm for the centering yes / no 2.2.1.2.5 Cassette and wafer specification -wafer material Quartz wafers (dimensions according 2.2.1.2.6 -2.2.1.2.10) yes / no 2.2.2.8 Pulsar optional suggestion for alternative Al-Sources yes/no 2.2.2.9 Pulsar BKM process and documentation for Thermal ALD of Ta2O3 with halogenide precursor inclusive suggestions for precursors to be provided yes / no 2.2.2.13 Pulsar Option for third heated precursor source "if no Hig available alternativ delivery of heating jacket for precursor source and lines; yes/no" 2.2.3.1 Subtools Pumps are included in the offer. yes/no 2.2.3.4 Subtools necessary Ozonizer yes/no 4.3.2.16 Process Acceptance-Tests Process test: 10nm HfO2 on 3D wafers with HfCl4 and metalorganic Hf-precursors (i.e. HyALD) "Check the Step Coverage in a deep trench structure, so that min. 70-80% of the coverage thickness is reached in the bottom of a trench for aspect ratios 1:20; yes / no" 4.8.1 Warranty extension Please offer an extension of the warranty of further 12 months. During the warranty period all support, repair and parts cost are covered and free of charge. yes / no 5.1.2 Requirement items that are to be offered Set of consumables (lamps, valves, etc., chamber and process kits) yes/no 5.1.3 Requirement items that are to be offered Offline Recipe Management System yes/no 5.2.2 General options Energy consumption recording system (e.g. electricity meter) yes/no 5.2.4 General options quote and timeline for new LPV-Vessel configuration retrofit for existing Pulsar chamber as upgrade yes/no 5.2.5 General Options quote for new consumables for old pulsar chamber (lamps, valves, etc., chamber and process kits) yes/no
Data provenance
This notice is sourced from TED - Tenders Electronic Daily (EU) and was originally published on June 30, 2026. Last refreshed 69 days ago. BidsFactory mirrors official procurement notices and links back to the source for full legal text.
About Fraunhofer-Gesellschaft - Einkauf B12
Fraunhofer-Gesellschaft - Einkauf B12 has issued 526 procurement notices on BidsFactory, including 42 currently open and 161 awarded contracts. Activity concentrates in Information & Communication Technology, General Supplies & Services, and Industry & Manufacturing. All notices are published for Germany. Notices are distributed via service.bund.de (Germany), TED - Tenders Electronic Daily (EU), and DÖE Bekanntmachungsservice (Germany). Most recent publication: September 11, 2026.
Frequently asked questions about this tender
How can I submit a bid?
Visit TED - Tenders Electronic Daily (EU) to access the full notice, required documents, and submission instructions provided by the contracting authority.
Is this tender still open?
No — the contract has already been awarded to ASM Europe B.V. The award notice is archived on BidsFactory for transparency and market intelligence.
Who is the contracting authority?
This notice was issued by Fraunhofer-Gesellschaft - Einkauf B12 in Germany. The authority is responsible for evaluating bids, awarding the contract, and managing performance.
What type of contract is this?
This is a Supplies contract in the Industry & Manufacturing sector. The classification helps bidders match the opportunity to their qualifications and registered scope of supply.
Where will the contract be performed?
The contract is for delivery in Germany. Foreign bidders should review local registration, taxation, and any in-country presence requirements before submitting.
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