Tenders/Deep Reaction Ion Etcher (DRIE)

Deep Reaction Ion Etcher (DRIE)

Uppsala universitet

Published: Nov 3, 2026

Updated: Nov 4, 2026

Source: TED - Tenders Electronic Daily (EU)

About This Opportunity

This is a supplies contract in the trade and industry sector. Located in Sweden, Europe, this opportunity is open to firms and consortiums.

Published through TED - Tenders Electronic Daily (EU), a national government procurement portal. Public procurement tenders follow the country's national bidding regulations and may have specific eligibility and documentation requirements for the supply of goods in the trade and industry sector. Supply contracts typically require bidders to demonstrate product compliance with technical specifications, delivery capacity, and relevant certifications. Interested parties should review the full documentation on the original source before submitting their proposal.

Description

Myfab Uppsala aims at purchasing a Deep Reaction Ion Etcher (DRIE). The purpose of the tool is to transfer patterns defined by e.g., photo- and electron beam lithography covering the pattens size range from all substrate range down to a few nanometres. The system will be used by many operators in a university laboratory environment. It must be easy to use and be insensitive to frequent change of process between batches. The processes include broad range of etching capability: low to high etch rate, wafer dicing, high uniformity, high open area, high aspect ratio, and nanometre scale. The system is intended for etching of silicon as well as other materials compatible with silicon etching, with both photoresist resins and hard masks for patterning.

Data provenance

This notice is sourced from TED - Tenders Electronic Daily (EU) and was originally published on November 3, 2026. Last refreshed 1 day ago. BidsFactory mirrors official procurement notices and links back to the source for full legal text.

About Uppsala universitet

Uppsala universitet has issued 27 procurement notices on BidsFactory, including 7 currently open and 9 awarded contracts. Activity concentrates in Research & Innovation, Industry & Manufacturing, and Culture, Heritage & Tourism. All notices are published for Sweden. Notices are distributed via TED - Tenders Electronic Daily (EU). Most recent publication: November 3, 2026.

Frequently asked questions about this tender

What type of contract is this?

This is a Supplies contract in the Industry & Manufacturing sector. The classification helps bidders match the opportunity to their qualifications and registered scope of supply.

Where will the contract be performed?

The contract is for delivery in Sweden. Foreign bidders should review local registration, taxation, and any in-country presence requirements before submitting.

How can I submit a bid?

Visit TED - Tenders Electronic Daily (EU) to access the full notice, required documents, and submission instructions provided by the contracting authority.

Who is the contracting authority?

This notice was issued by Uppsala universitet in Sweden. The authority is responsible for evaluating bids, awarding the contract, and managing performance.