Defect Inspection Tool (IPMS-MRS04.1) - PR948311-2480-P
About This Opportunity
This is a supplies contract in the information and communication technology sector. Located in Germany, Europe, this opportunity is open to firms and consortiums.
Published through DÖE Bekanntmachungsservice (Germany), a national government procurement portal. Public procurement tenders follow the country's national bidding regulations and may have specific eligibility and documentation requirements for the supply of goods in the information and communication technology sector. Supply contracts typically require bidders to demonstrate product compliance with technical specifications, delivery capacity, and relevant certifications. This contract has already been awarded. The information is published for transparency and market intelligence purposes.
Description
Auto-translated from GermanDefect Inspection Tool (IPMS-MRS04.1)
1 unit Defect Inspection Tool (IPMS-MRS04.1) This specification describes the requirements for a defect inspection system designed for the detection, identification, and classification of particles and pattern defects on structured and unstructured wafers. The device can accommodate substrates with a variable thickness of approximately 390 µm to 1200 µm, offering flexibility for different wafer types and applications. The inspection system features a sensitivity of up to 200 nm, enabling the detection of even the smallest defects that could impact wafer performance. The system is optimized for the semiconductor manufacturing process and specifically tailored for 200 mm MEMS wafers in a CMOS-compatible cleanroom environment. Optional positions: 1.7 General Requirements Capability to process 300 mm wafers yes/no 3.2 Process Specification Capability for separate BF/DF illumination yes/no 3.3 Process Specification Capability for dual-channel inspection (BF/DF) yes/no 3.7 Process Specification The tool supports the creation of waferless recipes yes/no 3.29 Process Specification Capability to generate a full wafer image yes/no 4.2 Contamination Level Contamination level for non-precious metals Al, Ti ≤ 50.0*E10 at/cm², all other metals ≤ 5.0*E10 at/cm²; yes/no 4.4 Contamination Level Contamination level for precious metals (Ag, Au, Pd, Pt, Ru) Confirmation of precious metal concentration < 0.05*E10 at/cm2 (< LOD); yes/no 5.5 Cassette/Wafer Specifications Option to handle wafers with high warpage < ± 200 µm yes/no
Data provenance
This notice is sourced from DÖE Bekanntmachungsservice (Germany) and was originally published on July 30, 2026. Last refreshed 2 days ago. Original language: German. BidsFactory mirrors official procurement notices and links back to the source for full legal text.
About Fraunhofer-Gesellschaft - Einkauf B12
Fraunhofer-Gesellschaft - Einkauf B12 has issued 412 procurement notices on BidsFactory, including 43 currently open and 133 awarded contracts. Activity concentrates in General Supplies & Services, Information & Communication Technology, and Industry & Manufacturing. All notices are published for Germany. Notices are distributed via service.bund.de (Germany), TED - Tenders Electronic Daily (EU), and DÖE Bekanntmachungsservice (Germany). Most recent publication: August 6, 2026.
Frequently asked questions about this tender
Who is the contracting authority?
This notice was issued by Fraunhofer-Gesellschaft - Einkauf B12 in Germany. The authority is responsible for evaluating bids, awarding the contract, and managing performance.
What type of contract is this?
This is a Supplies contract in the Information & Communication Technology sector. The classification helps bidders match the opportunity to their qualifications and registered scope of supply.
Where will the contract be performed?
The contract is for delivery in Germany. Foreign bidders should review local registration, taxation, and any in-country presence requirements before submitting.
How can I submit a bid?
Visit DÖE Bekanntmachungsservice (Germany) to access the full notice, required documents, and submission instructions provided by the contracting authority.
Is this tender still open?
No — the contract has already been awarded to KLA CORPORATION. The award notice is archived on BidsFactory for transparency and market intelligence.
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