Tenders/Supply of ICP RIE plasma etching equipment with substrate heating capability during the process
Awarded🇵🇱PolandSupplies

Supply of ICP RIE plasma etching equipment with substrate heating capability during the process

Auto-translated from Polish
Original title: Dostawa urządzenia do trawienia plazmowego ICP RIE z koniecznością grzania podłoża podczas procesu
Sieć Badawcza Łukasiewicz - Instytut Mikroelektroniki i Fotoniki
Published: Dec 16, 2025
Updated: Jun 20, 2026
Source: TED - Tenders Electronic Daily (EU)

This tender has been awarded

Awarded to Electron Mec srl — €715,000

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About This Opportunity

Translated

This tender concerns the procurement of advanced plasma etching equipment, specifically an Inductively Coupled Plasma Reactive Ion Etching (ICP RIE) system. The core requirement for this system is its capability to heat the substrate during the etching process. The scope of the contract includes not only the supply of the ICP RIE equipment but also its professional installation, commissioning, and thorough testing to ensure it meets all specified performance criteria. Furthermore, the successful bidder will be responsible for providing comprehensive technical documentation related to the equipment's operation and maintenance, as well as delivering specialized training for the end-users. This equipment is crucial for advanced material processing, likely within a research and development or high-tech manufacturing environment where precise control over etching parameters, including substrate temperature, is essential for achieving desired results. The tender emphasizes the need for a fully operational system, including all necessary support services, to ensure seamless integration and immediate usability upon delivery. Potential bidders should pay close attention to the technical specifications regarding substrate heating capabilities and the overall performance standards of the ICP RIE system.

This is a supplies contract in the Research and general supplies sectors, with a focus on R&D equipment. Located in Poland, Europe, this opportunity is open to firms and consortiums.

Published through TED - Tenders Electronic Daily (EU), a national government procurement portal. Public procurement tenders follow the country's national bidding regulations and may have specific eligibility and documentation requirements for the supply of goods in the Research sector. Supply contracts typically require bidders to demonstrate product compliance with technical specifications, delivery capacity, and relevant certifications. This contract has already been awarded. The information is published for transparency and market intelligence purposes.

Description

Original language: Polish

Przedmiotem zamówienia jest dostawa, instalacja, uruchomienie i testowanie urządzenia do trawienia plazmowego ICP RIE - z koniecznością grzania podłoża podczas procesu wraz z dokumentacją i szkoleniem.

Data provenance

This notice is sourced from TED - Tenders Electronic Daily (EU) and was originally published on December 16, 2025. Last refreshed 5 days ago. Original language: Polish. BidsFactory mirrors official procurement notices and links back to the source for full legal text.

About Sieć Badawcza Łukasiewicz - Instytut Mikroelektroniki i Fotoniki

Sieć Badawcza Łukasiewicz - Instytut Mikroelektroniki i Fotoniki has issued 69 procurement notices on BidsFactory, including 1 currently open and 33 awarded contracts. Activity concentrates in Research & Innovation, General Supplies & Services, and Information & Communication Technology. All notices are published for Poland. Notices are distributed via TED - Tenders Electronic Daily (EU), Poland e-Zamówienia, and Baza Konkurencyjności. Most recent publication: June 18, 2026.

Frequently asked questions about this tender

What type of contract is this?

This is a Supplies contract in the Research & Innovation sector. The classification helps bidders match the opportunity to their qualifications and registered scope of supply.

How much was the contract awarded for?

Electron Mec srl was awarded the contract for €715,000. The figure reflects the value disclosed by the contracting authority in the award notice.

Where will the contract be performed?

The contract is for delivery in Poland. Foreign bidders should review local registration, taxation, and any in-country presence requirements before submitting.

How can I submit a bid?

Visit TED - Tenders Electronic Daily (EU) to access the full notice, required documents, and submission instructions provided by the contracting authority.

Is this tender still open?

No — the contract has already been awarded to Electron Mec srl. The award notice is archived on BidsFactory for transparency and market intelligence.

Who is the contracting authority?

This notice was issued by Sieć Badawcza Łukasiewicz - Instytut Mikroelektroniki i Fotoniki in Poland. The authority is responsible for evaluating bids, awarding the contract, and managing performance.

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Key Details

Contract Type
Supplies
Eligibility
Firms / Consortiums
Language
Polish

Source

ted
TED - Tenders Electronic Daily (EU)
Public Procurement

Contracting Authority

Sieć Badawcza Łukasiewicz - Instytut Mikroelektroniki i Fotoniki
🇵🇱Poland

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