DUV Stepper
About This Opportunity
Award notice from Danmarks Tekniske Universitet - DTU (Denmark) — DUV Stepper. architecture & engineering. Awarded to Canon Europe N.V. (EUR 6.7M, Jan 2026).
This is a supplies contract in the architecture and engineering sector. Located in Denmark, Europe, this opportunity is open to firms and consortiums.
Published through TED - Tenders Electronic Daily (EU), a national government procurement portal. Public procurement tenders follow the country's national bidding regulations and may have specific eligibility and documentation requirements for the supply of goods in the architecture and engineering sector. Supply contracts typically require bidders to demonstrate product compliance with technical specifications, delivery capacity, and relevant certifications. This contract has already been awarded. The information is published for transparency and market intelligence purposes.
Description
To ensure the continuation of small and medium sized companies chip production and development in Danmark DTU Nanolab want to purchase a new (non-refurbished) DUV stepper using a 248 nm wavelength laser as illumination source (KrF laser unit from CYMER). It must furthermore be possible to handle several different wafer types and sizes: Wafer materials: Silicon, LNOI, Borofloat, quartz, III-V Wafer sizes in diameter: 100mm, 150mm and 200mm, furthermore it must be equipped with a multi wafer handling kit such that easy switching between at least 150mm and 200mm wafers is possible without longer downtime for reconfiguration of the equipment. Wafer thickness to be handled are from 350µm up to 1000µm and they can come with a bow up to at least +/- 200um for some wafers. As well as wafers with either notch or primary and secondary flats. It should also be equipped with a through silicon alignment possibility. The equipment must further have the possibility of off-axis as well as dipole illumination. Reuse of existing reticles and easy transfer of existing job files from the DUV stepper FPA-3000EX4 are essential. Due to space restriction the footprint of the main body must not exceed 2000mm x 3000mm x 2700mm (W x D x H).
Data provenance
This notice is sourced from TED - Tenders Electronic Daily (EU) and was originally published on March 10, 2026. Last refreshed 51 days ago. BidsFactory mirrors official procurement notices and links back to the source for full legal text.
About Danmarks Tekniske Universitet - DTU
Danmarks Tekniske Universitet - DTU has issued 51 procurement notices on BidsFactory, including 7 currently open and 34 awarded contracts. Activity concentrates in Research & Innovation, General Supplies & Services, and Information & Communication Technology. All notices are published for Denmark. Notices are distributed via TED - Tenders Electronic Daily (EU) and Denmark Udbud. Most recent publication: June 26, 2026.
Frequently asked questions about this tender
How much was the contract awarded for?
Canon Europe N.V. was awarded the contract for €6,675,000. The figure reflects the value disclosed by the contracting authority in the award notice.
Where will the contract be performed?
The contract is for delivery in Denmark. Foreign bidders should review local registration, taxation, and any in-country presence requirements before submitting.
How can I submit a bid?
Visit TED - Tenders Electronic Daily (EU) to access the full notice, required documents, and submission instructions provided by the contracting authority.
Is this tender still open?
No — the contract has already been awarded to Canon Europe N.V.. The award notice is archived on BidsFactory for transparency and market intelligence.
Who is the contracting authority?
This notice was issued by Danmarks Tekniske Universitet - DTU in Denmark. The authority is responsible for evaluating bids, awarding the contract, and managing performance.
What type of contract is this?
This is a Supplies contract in the Architecture & Engineering Services sector. The classification helps bidders match the opportunity to their qualifications and registered scope of supply.
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