Supply of a 200 mm bevel and edge polishing equipment for CEA Grenoble

The French Alternative Energies and Atomic Energy Commission (CEA) - Laboratory for Electronics, Integrated Technologies and Nanotechnology (LETI) in Grenoble is seeking to procure specialized equipment for bevel and edge polishing of 200 mm wafers. This acquisition is intended to support the research activities conducted at the Grenoble facility. The required equipment must operate in a "dry-in / dry-out" mode and include a minimum of three distinct stations. These stations are specified as: a bevel and edge polishing station, a notch polishing station, and a cleaning station. The cleaning station must incorporate at least a brush module and an IPA dryer. A key functional requirement for the bevel/edge polishing and notch polishing stations is their capability to non-selectively remove any material layer, regardless of thickness or nature, covering the initial substrate in a single pass. The tender also includes mandatory pricing for two options: Option 1, Level 1 maintenance training for 2 to 4 individuals, and Option 2, advanced maintenance training for 2 individuals. Additionally, two optional pricing options are presented: Option 3, a metrology module for characterizing the bevel profile, and Option 4, transport and insurance services under DAP CEA Grenoble conditions (Incoterms ICC 2020). The CEA reserves the right to exercise these options by the contract award date. The justification for not dividing the contract into lots is based on the integrated nature of the equipment and associated services (training, warranty), which necessitate performance by a single contractor, in accordance with Article L 2113-10 of the French Public Procurement Code.

This is a supplies contract in the Research and general supplies sectors, with a focus on R&D equipment and General Supplies. Located in France, Europe, this opportunity is open to firms and consortiums.

Published through TED - Tenders Electronic Daily (EU), a national government procurement portal. Public procurement tenders follow the country's national bidding regulations and may have specific eligibility and documentation requirements for the supply of goods in the Research sector. Supply contracts typically require bidders to demonstrate product compliance with technical specifications, delivery capacity, and relevant certifications. This contract has already been awarded. The information is published for transparency and market intelligence purposes.