Tenders/Fully automated in-line OCD and dimensional shape metrology system (IZM-133.3) - PR1320279-3460-P

Fully automated in-line OCD and dimensional shape metrology system (IZM-133.3) - PR1320279-3460-P

Fraunhofer-Gesellschaft - Einkauf B12

Published: Nov 5, 2026

Updated: Nov 5, 2026

Source: TED - Tenders Electronic Daily (EU)

About This Opportunity

This is a supplies contract in the trade and industry, agriculture and food security and finance and banking sectors, with a focus on Food Processing and Investment. Located in Germany, Europe, this opportunity is open to firms and consortiums.

Published through TED - Tenders Electronic Daily (EU), a national government procurement portal. Public procurement tenders follow the country's national bidding regulations and may have specific eligibility and documentation requirements for the supply of goods in the trade and industry sector. Supply contracts typically require bidders to demonstrate product compliance with technical specifications, delivery capacity, and relevant certifications. Interested parties should review the full documentation on the original source before submitting their proposal.

Description

1x Fully automated in-line OCD and dimensional shape metrology system (IZM-133.3) The following equipment specification defines the requirements for a fully automated metrology tool to measure critical dimension (CD) structures, film thickness and Cu dishing on 300 mm and 200 mm wafers. This investment expands the metrology capability for automated, non-destructive measurement of smaller feature sizes and surface topography. The tool is essential for process control in advanced packaging and interconnect fabrication, including post-CMP characterization of Cu structures with sub-micrometer feature sizes in highly integrated, chiplet-based 2.5D/3D and quasi-monolithic package architectures. The equipment is compatible with 3D wafer stacks exhibiting high warp/bow. Wafer substrates are silicon and/or glass, with thicknesses up to 2.5 mm. Before processing, wafers are delivered to the tool in front-opening unified pods (FOUPs), which the operator manually places on the respective load ports. The new tool must be able to perform the following sequence of steps fully automatically: - Load designated wafers from the FOUP(s) - Execute metrology tasks - Return wafers to their original positions in the FOUP(s) Recipe programming must support a sufficiently wide range of options and parameters to meet research and development (R&D) needs. It is required that the equipment continuously performs the intended functions without interruptions or failures, in accordance with all requirements specified in this document. Furthermore, the equipment must be supplied with all items described below that are necessary for it to deliver the intended functions and capabilities in compliance with all requirements set out in this document.

Data provenance

This notice is sourced from TED - Tenders Electronic Daily (EU) and was originally published on November 5, 2026. Last refreshed today. BidsFactory mirrors official procurement notices and links back to the source for full legal text.

About Fraunhofer-Gesellschaft - Einkauf B12

Fraunhofer-Gesellschaft - Einkauf B12 has issued 676 procurement notices on BidsFactory, including 59 currently open and 201 awarded contracts. Activity concentrates in Information & Communication Technology, Trade & Commerce, and General Supplies & Services. All notices are published for Germany. Notices are distributed via service.bund.de (Germany), TED - Tenders Electronic Daily (EU), and DÖE Bekanntmachungsservice (Germany). Most recent publication: November 4, 2026.

Frequently asked questions about this tender

How can I submit a bid?

Visit TED - Tenders Electronic Daily (EU) to access the full notice, required documents, and submission instructions provided by the contracting authority.

Who is the contracting authority?

This notice was issued by Fraunhofer-Gesellschaft - Einkauf B12 in Germany. The authority is responsible for evaluating bids, awarding the contract, and managing performance.

What type of contract is this?

This is a Supplies contract in the Industry & Manufacturing sector. The classification helps bidders match the opportunity to their qualifications and registered scope of supply.

Where will the contract be performed?

The contract is for delivery in Germany. Foreign bidders should review local registration, taxation, and any in-country presence requirements before submitting.