HookUp: Gas and Vacuum Exhaust Installation

At the University of Siegen, within the cleanroom (total area grey/white: 600m²) of the INCYTE research building, gas supply and vacuum exhaust installation work will be carried out for the permanent installation of existing large-scale equipment (3 x PVD, CVD, PECVD, ALD, RIE,...). The installations require connecting the systems to the existing gas network with the installation of additional pressure gauges, distributors, valves, and shut-off valves. Some of the gases are explosive, highly corrosive, and toxic, necessitating the execution of gas lines in orbitally welded, electropolished stainless steel. Additionally, the safety precautions corresponding to the types of gases must be fully considered in accordance with the standards and usual installation procedures. Specific gases include: SiH4, GeH4, PH3, B2H6, H2, CH4, SF6, Ar, O2, N2, C4F8, CHF3, CF4, He. Furthermore, the exhaust lines of process equipment will be connected to the building's internal exhaust system. This involves: 1. Permanent KF piping between the process chambers, including any turbo pumps and the corresponding pump stands (technical center below the grey/white area). 2. Connections of the large-scale equipment to gas scrubbers (to be provided by the client). 3. Connections of the large-scale equipment to the exhaust system and the building's cooling water supply. For all installed media (gas, water, vacuum exhaust), complete qualification protocols and test documents (including necessary leak test measurements, ...) must be included. In addition to the supply media to be installed, existing internal piping of a PECVD system (gases: SiH4, GeH4, PH3, B2H6, H2, CH4, SF6, Ar, O2) must be qualified according to the same criteria. The contract includes two HookUp phases. Phase 1 is planned for Q4/25 - Q1/26 and Phase 2 is expected for Q2/26 - Q4/26.