ICP Dry Etching System Chlorine IV (IAF-07b1) - PR1119209-2050-P
About This Opportunity
Germany contract award (ICT & digital): ICP Trockenätzanlage Chlor IV. By Fraunhofer-Gesellschaft - Einkauf B12. Awarded to SENTECH Gesellschaft für, Apr 2026.
This is a supplies contract in the information and communication technology sector. Located in Germany, Europe, this opportunity is open to firms and consortiums.
Published through DÖE Bekanntmachungsservice (Germany), a national government procurement portal. Public procurement tenders follow the country's national bidding regulations and may have specific eligibility and documentation requirements for the supply of goods in the information and communication technology sector. Supply contracts typically require bidders to demonstrate product compliance with technical specifications, delivery capacity, and relevant certifications. This contract has already been awarded. The information is published for transparency and market intelligence purposes.
Description
Original language: GermanICP Trockenätzanlage Chlor IV (IAF-07b1)
1 piece Chlorine ICP Chlorine ICP etching system with planar plasma source The etching processes developed and qualified at the IAF for structuring must be directly reusable on the new system and deliver corresponding etching results, as with the etching system currently in use (Sentech ICP-RIE SI500 537). These known processes should be transferable to wafer sizes of 150 mm. Options: Substrate electrode Option to etch wafers with a diameter of 100 mm (flat) and fragments on metal carriers. Substrate electrode Option to etch 75 mm diameter wafers (flat) and fragments on metal carriers. Process chamber Heated liner Service Extended warranty Spare parts kit Gas ring Spare parts kit MVV measuring tube Spare parts kit Silencer and protective cover for lock pump Spare parts kit Turbo pump for lock Spare parts kit Coupling plate without window Spare parts kit Clamping for 150 mm wafers with notch Spare parts kit Julabo recirculating cooler as replacement Spare parts kit PLC control unit (CPU / RFC) Translated with DeepL.com (free version)
Data provenance
This notice is sourced from DÖE Bekanntmachungsservice (Germany) and was originally published on April 29, 2026. Last refreshed today. Original language: German. BidsFactory mirrors official procurement notices and links back to the source for full legal text.
About Fraunhofer-Gesellschaft - Einkauf B12
Fraunhofer-Gesellschaft - Einkauf B12 has issued 211 procurement notices on BidsFactory, including 30 currently open and 75 awarded contracts. Activity concentrates in General Supplies & Services, Information & Communication Technology, and Industry & Manufacturing. All notices are published for Germany. Notices are distributed via TED - Tenders Electronic Daily (EU), service.bund.de (Germany), and DÖE Bekanntmachungsservice (Germany). Most recent publication: May 21, 2026.
Frequently asked questions about this tender
What type of contract is this?
This is a Supplies contract in the Information & Communication Technology sector. The classification helps bidders match the opportunity to their qualifications and registered scope of supply.
Where will the contract be performed?
The contract is for delivery in Germany. Foreign bidders should review local registration, taxation, and any in-country presence requirements before submitting.
How can I submit a bid?
Visit DÖE Bekanntmachungsservice (Germany) to access the full notice, required documents, and submission instructions provided by the contracting authority.
Is this tender still open?
No — the contract has already been awarded to SENTECH Gesellschaft für Sensortechnik mbH. The award notice is archived on BidsFactory for transparency and market intelligence.
Who is the contracting authority?
This notice was issued by Fraunhofer-Gesellschaft - Einkauf B12 in Germany. The authority is responsible for evaluating bids, awarding the contract, and managing performance.
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