Laser lithography

Auto-translated from German

Original title: Laserlithographie

Deutsches Zentrum für Luft- und Raumfahrt e.V. (DLR)

Published: Sep 4, 2026

Updated: Sep 4, 2026

Source: TED - Tenders Electronic Daily (EU)

This tender has been awarded

Awarded to Heidelberg Instruments Mikrotechnik GmbH

Browse open Research & Innovation tenders in Germany

About This Opportunity

This is a supplies contract in the Research sector. Located in Germany, Europe, this opportunity is open to firms and consortiums.

Published through TED - Tenders Electronic Daily (EU), a national government procurement portal. Public procurement tenders follow the country's national bidding regulations and may have specific eligibility and documentation requirements for the supply of goods in the Research sector. Supply contracts typically require bidders to demonstrate product compliance with technical specifications, delivery capacity, and relevant certifications. This contract has already been awarded. The information is published for transparency and market intelligence purposes.

Description

Auto-translated from German

For the equipment of the cleanroom for the production of compact quantum systems, devices for a microtechnology process chain will be procured. A complete process technology chain will be created from the wafer substrate to the quantum chip, which will be established in a cleanroom provided by the University of Ulm. There, the Institute for Quantum Technologies will build, among other things, technologies for compact vapor cells and components for quantum memories, based on the technology of cold atomic gases. For the equipment of the cleanroom, a machine park for the production, processing, and integration of cold atomic gases and related quantum technologies will be expanded. As part of this tender, another system for a classic microstructure process chain for the cleanroom will be procured. This serves for direct lithography on the target substrate with high resolution as well as for the production of UV lithography masks using laser lithography. The tender includes only the specified system; the necessary media and peripherals will be provided separately by the DLR. Further information can be found in the attached service description (contract documents).

Data provenance

This notice is sourced from TED - Tenders Electronic Daily (EU) and was originally published on September 4, 2026. Last refreshed 12 days ago. Original language: German. BidsFactory mirrors official procurement notices and links back to the source for full legal text.

About Deutsches Zentrum für Luft- und Raumfahrt e.V. (DLR)

Deutsches Zentrum für Luft- und Raumfahrt e.V. (DLR) has issued 188 procurement notices on BidsFactory, including 15 currently open and 108 awarded contracts. Activity concentrates in Information & Communication Technology, Water & Sanitation, and Research & Innovation. All notices are published for Germany. Notices are distributed via TED - Tenders Electronic Daily (EU) and DÖE Bekanntmachungsservice (Germany). Most recent publication: September 11, 2026.

Frequently asked questions about this tender

Where will the contract be performed?

The contract is for delivery in Germany. Foreign bidders should review local registration, taxation, and any in-country presence requirements before submitting.

How can I submit a bid?

Visit TED - Tenders Electronic Daily (EU) to access the full notice, required documents, and submission instructions provided by the contracting authority.

Is this tender still open?

No — the contract has already been awarded to Heidelberg Instruments Mikrotechnik GmbH. The award notice is archived on BidsFactory for transparency and market intelligence.

Who is the contracting authority?

This notice was issued by Deutsches Zentrum für Luft- und Raumfahrt e.V. (DLR) in Germany. The authority is responsible for evaluating bids, awarding the contract, and managing performance.

What type of contract is this?

This is a Supplies contract in the Research & Innovation sector. The classification helps bidders match the opportunity to their qualifications and registered scope of supply.