Tenders/Announcement of Evaluation Results for the Procurement Project of VOX Vanadium Oxide Thin Film Sputtering Deposition Equipment for the MEMS Heterogeneous Integration Common Process Platform Project for Intelligent Sensors
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Announcement of Evaluation Results for the Procurement Project of VOX Vanadium Oxide Thin Film Sputtering Deposition Equipment for the MEMS Heterogeneous Integration Common Process Platform Project for Intelligent Sensors

Auto-translated from Chinese
Original title: 面向智能传感器的mems异质异构集成共性工艺平台项目vox氧化钒薄膜溅射沉积设备采购项目评标结果公示公告
Published: Mar 13, 2026
Updated: Apr 29, 2026
Source: ChinaBidding

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About This Opportunity

Translated

This announcement discloses the evaluation results for the procurement of VOX (Vanadium Oxide) thin film sputtering deposition equipment. This specialized equipment is designated for the MEMS (Micro-Electro-Mechanical Systems) heterogeneous integration common process platform project, which focuses on intelligent sensors. The project's objective is to create a comprehensive process platform for advanced MEMS fabrication, facilitating the integration of diverse materials and technologies to develop sophisticated intelligent sensors. The VOX sputtering deposition equipment is essential for depositing thin films of vanadium oxide, a material with unique electrical and optical properties, often used in microbolometers, sensors, and other microelectronic applications. Its precise control over film thickness and composition is critical for achieving desired device performance. The tender, referenced as 0705-264506024002, operates within the Computer, Communication, and Other Electronic Equipment Manufacturing sector and was conducted in Shanghai, China. Funding was secured through spot exchange. The公示公告 (gōngshì gōnggào) signifies the public announcement of the tender's evaluation outcomes, providing transparency regarding the selection of the vendor for this advanced deposition equipment, which is key to the project's success in developing cutting-edge intelligent sensor technologies.

This is a supplies contract in the information and communication technology sector. Located in China, Asia, this opportunity is open to firms and consortiums.

Published through ChinaBidding, a national government procurement portal. Public procurement tenders follow the country's national bidding regulations and may have specific eligibility and documentation requirements for the supply of goods in the information and communication technology sector. Supply contracts typically require bidders to demonstrate product compliance with technical specifications, delivery capacity, and relevant certifications. This contract has already been awarded. The information is published for transparency and market intelligence purposes.

Description

Original language: Chinese

0705-264506024003,面向智能传感器的MEMS异质异构集成共性工艺平台项目VOX氧化钒薄膜溅射沉积设备采购项目 | 行业: 计算机、通信和其他电子设备制造业 | 地区: 中国上海市 | 资金来源: 现汇

Data provenance

This notice is sourced from ChinaBidding and was originally published on March 13, 2026. Last refreshed 57 days ago. Original language: Chinese. BidsFactory mirrors official procurement notices and links back to the source for full legal text.

Frequently asked questions about this tender

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Is this tender still open?

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What type of contract is this?

This is a Supplies contract in the Information & Communication Technology sector. The classification helps bidders match the opportunity to their qualifications and registered scope of supply.

Where will the contract be performed?

The contract is for delivery in China. Foreign bidders should review local registration, taxation, and any in-country presence requirements before submitting.

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