Tenders/[German] Reactive ion etching
Open🇩🇪GermanySupplies

[German] Reactive ion etching

Auto-translated from German
Original title: Reaktives Ionenätzen
Freistaat Bayern, vertreten durch die Universität Erlangen-Nürnberg
Published: Aug 27, 2026
Updated: Aug 27, 2026
Source: TED - Tenders Electronic Daily (EU)

About This Opportunity

This is a supplies contract in the architecture and engineering sector. Located in Germany, Europe, this opportunity is open to firms and consortiums. Proposals must be submitted before September 4, 2026.

Published through TED - Tenders Electronic Daily (EU), a national government procurement portal. Public procurement tenders follow the country's national bidding regulations and may have specific eligibility and documentation requirements for the supply of goods in the architecture and engineering sector. Supply contracts typically require bidders to demonstrate product compliance with technical specifications, delivery capacity, and relevant certifications. Interested parties should review the full documentation on the original source before submitting their proposal.

Description

Original language: German
Für die aktuell am Lehrstuhl durchzuführenden Projekte ist die Herstellung freistehender Wellenleiter mittels "Faraday Cage Etching" zentral. Dieser komplexe Prozess erfordert zwei völlig unterschiedliche Ätzregime in derselben Kammer. Entsprechend werden Entkoppelte Plasmadichte und Ionenenergie (für p-i-n Dioden Integration) benötigt. Weitere Forschungsprojekte erfordern eine aktive Helium-Rückseitenkühlung (für nanophotonische Wellenleiter), um "Fließen" oder Verbrennen des Elektronenstrahl-Resists (E-Beam Lack) zu verhindern. Bei zusätzlichen Projekten sowie bei der Nachbearbeitung von FIB-implantierten Defekten hat die Erhaltung der Kristallqualität oberste Priorität. Hochenergetischer Ionenbeschuss würde das Gitter schädigen und die optische Kohärenz der Farbzentren zerstören. Wichtig ist die schonende Entfernung von Oberflächenschichten ("Soft Etch"), ohne neue Defekte tief in den Kristall einzutragen. Letztlich werden für die Strukturierung der Solid Immersion Lenses (SILs) in Diamant ein reines Sauerstoff-Plasma benötigt, während SiC eine Fluor-Chemie (SF₆/CHF₃) erfordert. Entsprechend notwendig ist eine Gasbox mit mindestens 5 Leitungen für Fluor- und Sauerstoff-Prozesse , um beide Materialklassen ohne Hardware-Umbau bearbeiten zu können. Ein "Open Load"-Design ist zudem für die geplante Arbeitsweise (Bearbeitung kleiner Bruchstück-Proben auf Carrier-Wafern) die technisch sinnvollste Lösung, da es im Gegensatz zu Load-Lock-Systemen keine aufwendige Anpassung von Roboter-Handlingsystemen an irreguläre Probengeometrien erfordert.

Data provenance

This notice is sourced from TED - Tenders Electronic Daily (EU) and was originally published on August 27, 2026. Last refreshed today. Original language: German. BidsFactory mirrors official procurement notices and links back to the source for full legal text.

About Freistaat Bayern, vertreten durch die Universität Erlangen-Nürnberg

Freistaat Bayern, vertreten durch die Universität Erlangen-Nürnberg has issued 5 procurement notices on BidsFactory, including 1 currently open and 1 awarded contracts. Activity concentrates in Research & Innovation, Education & Training, and Architecture & Engineering Services. All notices are published for Germany. Notices are distributed via TED - Tenders Electronic Daily (EU) and DÖE Bekanntmachungsservice (Germany). Most recent publication: August 27, 2026.

Frequently asked questions about this tender

Who is the contracting authority?

This notice was issued by Freistaat Bayern, vertreten durch die Universität Erlangen-Nürnberg in Germany. The authority is responsible for evaluating bids, awarding the contract, and managing performance.

What type of contract is this?

This is a Supplies contract in the Architecture & Engineering Services sector. The classification helps bidders match the opportunity to their qualifications and registered scope of supply.

Where will the contract be performed?

The contract is for delivery in Germany. Foreign bidders should review local registration, taxation, and any in-country presence requirements before submitting.

How can I submit a bid?

Visit TED - Tenders Electronic Daily (EU) to access the full notice, required documents, and submission instructions provided by the contracting authority.

When does this tender close?

The submission deadline is September 4, 2026. You have 9 days left to prepare and submit your proposal to the contracting authority.

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Key Details

Submission Deadline
Sep 4, 2026
9 days remaining
Contract Type
Supplies
Eligibility
Firms / Consortiums
Language
German

Source

ted
TED - Tenders Electronic Daily (EU)
Public Procurement

Contracting Authority

Freistaat Bayern, vertreten durch die Universität Erlangen-Nürnberg
🇩🇪Germany

Contact

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