Tenders/An ion reactive plasma etching equipment for metals for the MicroNanoTechnology Center

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An ion reactive plasma etching equipment for metals for the MicroNanoTechnology Center

Auto-translated from French

Original title: Un équipement plasma de gravure ionique réactive de métaux pour le Centre de MicroNanoTechnologie

EPFL-Scientific Equipment

Published: Oct 6, 2026

Updated: Oct 6, 2026

Source: TED - Tenders Electronic Daily (EU)

About This Opportunity

This is a supplies contract in the Research sector. Located in Switzerland, Europe, this opportunity is open to firms and consortiums.

Published through TED - Tenders Electronic Daily (EU), a national government procurement portal. Public procurement tenders follow the country's national bidding regulations and may have specific eligibility and documentation requirements for the supply of goods in the Research sector. Supply contracts typically require bidders to demonstrate product compliance with technical specifications, delivery capacity, and relevant certifications. Interested parties should review the full documentation on the original source before submitting their proposal.

Description

Original language: French

L’EPFL a l’intention d’acquérir un équipement plasma de gravure ionique réactive de métaux pour son Centre de MicroNanoTechnologie (CMi), afin de traiter aussi bien des photomasques carrés que des wafers standards, et de diverses dimensions possibles. Le CMi est une installation de salles blanches dédiée à la micro/nano fabrication, centrale pour l’ensemble des facultés de l’EPFL, ainsi que pour les industriels locaux (>650 utilisateurs actifs par an). Cet équipement sera dédié aux besoins de recherche de pointe en micro et nano fabrication, et plus particulièrement à la gravure de couches de Chrome déposées sur des masques/réticules de lithographie ainsi que sur des wafers. Une grande importance sera accordée non seulement à la qualité des gravures, mais également à comment les contaminations croisées entre différents matériaux sont évitées comme second élément clé pour la flexibilité d’usage prévue pour cet équipement. La facilité d’utilisation de l’équipement, sa simplicité/rapidité d’apprentissage pour les nouveaux utilisateurs et sa flexible mais néanmoins robuste capacité de contrôle de procédés de gravure dans un environnement type R&D sont également de grande importance. La proximité, la réactivité du fournisseur et le support disponible (technique, procédés) seront évalués.

Data provenance

This notice is sourced from TED - Tenders Electronic Daily (EU) and was originally published on October 6, 2026. Last refreshed today. Original language: French. BidsFactory mirrors official procurement notices and links back to the source for full legal text.

About EPFL-Scientific Equipment

EPFL-Scientific Equipment has issued 49 procurement notices on BidsFactory, including 12 currently open and 11 awarded contracts. Activity concentrates in Research & Innovation, General Supplies & Services, and Information & Communication Technology. All notices are published for Switzerland. Notices are distributed via TED - Tenders Electronic Daily (EU) and SIMAP Switzerland. Most recent publication: October 6, 2026.

Frequently asked questions about this tender

Who is the contracting authority?

This notice was issued by EPFL-Scientific Equipment in Switzerland. The authority is responsible for evaluating bids, awarding the contract, and managing performance.

What type of contract is this?

This is a Supplies contract in the Research & Innovation sector. The classification helps bidders match the opportunity to their qualifications and registered scope of supply.

Where will the contract be performed?

The contract is for delivery in Switzerland. Foreign bidders should review local registration, taxation, and any in-country presence requirements before submitting.

How can I submit a bid?

Visit TED - Tenders Electronic Daily (EU) to access the full notice, required documents, and submission instructions provided by the contracting authority.