Upgrade of a 200 mm WxZ Tungsten CVD Chamber to WxZ Sprint Configuration

IHP GmbH - Leibniz-Institut für innovative Mikroelektronik

Published: Jun 5, 2026

Updated: Jun 5, 2026

Source: TED - Tenders Electronic Daily (EU)

About This Opportunity

This is a supplies contract in the trade and industry sector. Located in Germany, Europe, this opportunity is open to firms and consortiums. Proposals must be submitted before June 26, 2026.

Published through TED - Tenders Electronic Daily (EU), a national government procurement portal. Public procurement tenders follow the country's national bidding regulations and may have specific eligibility and documentation requirements for the supply of goods in the trade and industry sector. Supply contracts typically require bidders to demonstrate product compliance with technical specifications, delivery capacity, and relevant certifications. Interested parties should review the full documentation on the original source before submitting their proposal.

Description

Gegenstand der Beschaffung ist das Upgrade eines bestehenden 200 mm Wolfram-CVD-Systems des Herstellers Applied Materials Inc. (AMAT) auf eine WxZ Sprint Konfiguration. Hierfür sind die Lieferung, Integration und Inbetriebnahme der erforderlichen Hard- und Softwarekomponenten sowie die Durchführung aller notwendigen Anpassungs-, Test- und Qualifizierungsmaßnahmen erforderlich. Der Leistungsumfang umfasst insbesondere die Modifikation des Gasverteilungssystems zur Realisierung eines kontrollierten Umschaltens der Prozessgase WF6 und SiH4 zwischen Abgasleitung und Prozesskammer zur Unterstützung eines gepulsten Wolfram-Abscheidungsprozesses für High Aspect Ratio Gap-Fill Anwendungen. Darüber hinaus ist zusätzliche Hardware zur Ermöglichung von Depositionsdrücken bis 300 Torr zu liefern und in das bestehende System zu integrieren. Die angebotene Lösung muss mit der vorhandenen Anlagenkonfiguration kompatibel sein und die technische Funktionalität einer WxZ Sprint Konfiguration gewährleisten. Zur Ermittlung des konkreten Anpassungsbedarfs wird eine Vor-Ort-Besichtigung der Anlage empfohlen.

Data provenance

This notice is sourced from TED - Tenders Electronic Daily (EU) and was originally published on June 5, 2026. Last refreshed today. Original language: German. BidsFactory mirrors official procurement notices and links back to the source for full legal text.

About IHP GmbH - Leibniz-Institut für innovative Mikroelektronik

IHP GmbH - Leibniz-Institut für innovative Mikroelektronik has issued 11 procurement notices on BidsFactory, including 3 currently open and 5 awarded contracts. Activity concentrates in Industry & Manufacturing, Energy & Power, and Architecture & Engineering Services. All notices are published for Germany. Notices are distributed via TED - Tenders Electronic Daily (EU) and Vergabe Brandenburg (Germany). Most recent publication: June 5, 2026.

Frequently asked questions about this tender

What type of contract is this?

This is a Supplies contract in the Industry & Manufacturing sector. The classification helps bidders match the opportunity to their qualifications and registered scope of supply.

Where will the contract be performed?

The contract is for delivery in Germany. Foreign bidders should review local registration, taxation, and any in-country presence requirements before submitting.

How can I submit a bid?

Visit TED - Tenders Electronic Daily (EU) to access the full notice, required documents, and submission instructions provided by the contracting authority.

When does this tender close?

The submission deadline is June 26, 2026. You have 22 days left to prepare and submit your proposal to the contracting authority.

Who is the contracting authority?

This notice was issued by IHP GmbH - Leibniz-Institut für innovative Mikroelektronik in Germany. The authority is responsible for evaluating bids, awarding the contract, and managing performance.