Optical film stress measurement tool

VTT Technical Research Centre of Finland Ltd

Published: May 19, 2026

Updated: May 21, 2026

Source: TED - Tenders Electronic Daily (EU)

About This Opportunity

This is a supplies contract in the Research sector. Located in Finland, Europe, this opportunity is open to firms and consortiums. Proposals must be submitted before May 28, 2026.

Published through TED - Tenders Electronic Daily (EU), a national government procurement portal. Public procurement tenders follow the country's national bidding regulations and may have specific eligibility and documentation requirements for the supply of goods in the Research sector. Supply contracts typically require bidders to demonstrate product compliance with technical specifications, delivery capacity, and relevant certifications. Interested parties should review the full documentation on the original source before submitting their proposal.

Description

THE OBJECT OF THE TENDER PROCESS The object of the procurement is a 200 mm automated film stress and wafer bow analysis system using a non-contact laser scanning technique for the VTT Micronova cleanroom. The procurement includes a room temperature automated thin-film stress measurement system, cassette load lock, robot to handle the wafers, programmable automatic wafer scanning system, and analysis software. The tool should be designed to be used inside the clean room. The supplier will take to consideration the environmental conditions of the tool installation location and will work together with VTT to reduce the external impact on facility. The automated thin-film stress analysis system is for non-patterned, non-texture 200 mm wafer stress measurement. The technical specification of the object of the tender and its minimum requirements is described in more detail in this Annex 1 of the invitation to tender. The tendered Tool must comply with all technical properties and functionalities, performance specifications and acceptance criteria as set out in Annex 1 and Annex 2 (“Facilities, materials and connector types”). A tender which does not meet one or more of the requirements specified in the Annex 1 and Annex 2, may be rejected for failing to comply with the call for tenders. The comparison criterion for the tenders is economic advantageous (see section "Grounds for decision") with 80 % price weighting and 20 % quality weighting. A reference price has to be given for the equipment that meets all the requirements set in the invitation to tender, especially its Annex 1. Partial tenders will not be accepted. NON-MANDATORY OPTIONAL FEATURES Please see Annex 1 section 3.4.10 of the invitation to tender. The tenderer may offer the feature as an optional item in its tender. PLEASE NOTE: the optional item shall not be included in the comparison price of the device but shall be priced separately.

Data provenance

This notice is sourced from TED - Tenders Electronic Daily (EU) and was originally published on May 19, 2026. Last refreshed today. BidsFactory mirrors official procurement notices and links back to the source for full legal text.

About VTT Technical Research Centre of Finland Ltd

VTT Technical Research Centre of Finland Ltd has issued 16 procurement notices on BidsFactory, including 5 currently open and 2 awarded contracts. Activity concentrates in Research & Innovation, Governance & Public Administration, and Information & Communication Technology. All notices are published for Finland. Notices are distributed via TED - Tenders Electronic Daily (EU) and Hilma Finland. Most recent publication: May 19, 2026.

Frequently asked questions about this tender

When does this tender close?

The submission deadline is May 28, 2026. You have 7 days left to prepare and submit your proposal to the contracting authority.

Who is the contracting authority?

This notice was issued by VTT Technical Research Centre of Finland Ltd in Finland. The authority is responsible for evaluating bids, awarding the contract, and managing performance.

What type of contract is this?

This is a Supplies contract in the Research & Innovation sector. The classification helps bidders match the opportunity to their qualifications and registered scope of supply.

Where will the contract be performed?

The contract is for delivery in Finland. Foreign bidders should review local registration, taxation, and any in-country presence requirements before submitting.

How can I submit a bid?

Visit TED - Tenders Electronic Daily (EU) to access the full notice, required documents, and submission instructions provided by the contracting authority.